Thermal Testing

MicroXact offers a wide range of thermal solutions for wafer probing over a wide temperature range. Liquid nitrogen-cooled, closed-cycle solutions or convention-cooled wafer chucks are available with different sizes and various coatings and structures (isolated, grounded, coaxial, triaxial). Variable temperature probe stations in various configurations (with environmental enclosures for below 0°C testing, cooled platens for above 200°C testing)”


MicroXact’s Environmental Enclosure, compatible with our standard probe stations (SPS models), are designed to provide light shielding and protection against moisture.


For customers requiring testing in vacuum or controlled gas environment MicroXact offers ergonomic and highly customizable vacuum chambers.