MicroXact offers a wide range of thermal solutions for wafer probing over a wide temperature range. Liquid nitrogen-cooled, closed-cycle solutions or convention-cooled wafer chucks are available with different sizes and various coatings and structures (isolated, grounded, coaxial, triaxial). Variable temperature probe stations in various configurations (with environmental enclosures for below 0°C testing, cooled platens for above 200°C testing)”
The TC-SYS-150 system includes a thermal controller with USB interface and Windows-compatible control software as well as a liquid nitrogen cooling system with 6-stage pump and 10-liter dewar.
MicroXact’s Environmental Enclosure, compatible with our standard probe stations (SPS models), are designed to provide light shielding and protection against moisture.