Semi-Automated Vacuum Probe Systems
The SPS-2600-VAC and SPS-2800-VAC Series are MicroXact’s vacuum probe systems designed to support motorized or semi-automatic probing of up to 100mm or up to 200mm wafers in a vacuum or controlled gas atmosphere. This vacuum testing solution is systematic and precise, cost-efficient, low noise and convenient-to-use. These vacuum probe systems are built on a vibration-compensated, versatile platform capable of being configured to handle a wide range of probing applications. Ideal for icing-free testing down to 77K or for high temperature testing of devices and components that are prone to oxidation, MicroXact’s vacuum probe systems offer controlled environment wafer-level probing.