Standard Semi-Automated Systems

Motorized XY chuck, motorized platen in SPS-2600, motorized Z movement of the chuck in SPS 2800 in standard configuration. Motorized theta is an option.
Stepper motor-based, no encoders.
Very cost competitive
Highly recommended in applications where sub-0°C testing or shielding is desired
Options available: heated or cooled chucks, zoom scopes or compound microscopes, various shielding, selection of the chucks for DC and RF measurements, and many more

Additional Information

Wafer Size
Up to 200mm
Motor type
Stepper motor
XY Stage Travel
Up to 200mmx200mm
XY Stage Resolution
motorized, 6.5μm repeatability
XY speed (max)
9.5mm/s
Z speed (max)
5mm/s
Platen Travel
12.7mm or more
Platen Adjustment
Dual coarse and fine control with better than 2.5µm repeatability
Platen Planarity
<12.7μm across 200mm
Platen Rigidity
<50μm for 4.5kg
Vacuum Chuck
Multi-zone vacuum
Chuck Flatness
+/-13μm
Chuck Breakdown Voltage
At least 500V
Chuck Isolation
At least 1GΩ
Chuck Adjustment
360° coarse, +/-6° fine
Microscope
High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X
Feedthrough Terminals
BNC, Triax or Banana plug
System Dimensions
122cm wide x122cm deep x 92cm high

Wafer Size
Up to 100mm
Motor type
Stepper motor
XY Stage Travel
Up to 125mmx125mm
XY Stage Resolution
motorized, 6.5μm repeatability
XY speed (max)
9.5mm/s
Z speed (max)
5mm/s
Platen Travel
12.7mm or more
Platen Adjustment
Dual coarse and fine control with better than 2.5µm repeatability
Platen Planarity
<12.7μm across 150mm
Platen Rigidity
<50μm for 4.5kg
Vacuum Chuck
Multi-zone vacuum
Chuck Flatness
+/-13μm
Chuck Breakdown Voltage
At least 500V
Chuck Isolation
At least 1GΩ
Chuck Adjustment
360° coarse, +/-6° fine
Microscope

High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X
Feedthrough Terminals
BNC, Triax or Banana plug
System Dimensions
78cm wide x80cm deep x 58cm high