High-Speed Semi-Automated Systems
- Motorized XY chuck, motorized platen in SPS-2600, motorized Z movement of the chuck in SPS 2800 in standard configuration. Motorized theta is an option.
- Servo motor-based, linear encoders.
- Very cost competitive, very fast, high productivity solution
- Highly recommended for medium scale production or other applications where throughput is important
Specifications
- SPS-12000-HS
- SPS-2800-HS
- SPS-2600-HS
- SPS-12000-HS
- SPS-2800-HS
- SPS-2600-HS
- Wafer Size
Up to 300mm
- Motor type
Servo motor
- XY Stage Travel
Up to 300mmx300mm
- XY Stage Resolution, Repeatability
Motorized, 0.15μm resolution, +/-1.2μm repeatability
- XY Speed/ acceleration (max)
Up to 1000mm/s, up to 35mm/s2
- Z Speed
20mm/s
- Platen Travel
12.7mm or 25mm
- Platen Adjustment
Dual coarse and fine control with better than 2.5µm repeatability
- Platen Planarity
<12.7μm across 200mm
- Platen Rigidity
<50μm for 4.5kg
- Vacuum Chuck
Multi-zone vacuum
- Chuck Flatness
+/-13μm
- Chuck Breakdown Voltage
At least 500V
- Chuck Isolation
At least 1GΩ
- Chuck Adjustment
360° coarse, +/-6° fine
- Microscope
High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X
- Feedthrough Terminals
BNC, Triax or Banana plug
- System Dimensions
101cm wide x91cm deep x 88cm high
- Wafer Size
Up to 200mm
- Motor type
Servo motor
- XY Stage Travel
Up to 200mmx200mm
- XY Stage Resolution, Repeatability
Motorized, 0.15μm resolution, +/-0.8μm repeatability
- XY Speed/ acceleration (max)
Up to 1000mm/s, up to 35mm/s2
- Z Speed
20mm/s
- Platen Travel
12.7mm or 25mm
- Platen Adjustment
Dual coarse and fine control with better than 2.5µm repeatability
- Platen Planarity
<12.7μm across 200mm
- Platen Rigidity
<50μm for 4.5kg
- Vacuum Chuck
Multi-zone vacuum
- Chuck Flatness
+/-13μm
- Chuck Breakdown Voltage
At least 500V
- Chuck Isolation
At least 1GΩ
- Chuck Adjustment
360° coarse, +/-6° fine
- Microscope
High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X
- Feedthrough Terminals
BNC, Triax or Banana plug
- System Dimensions
122cm wide x122cm deep x 92cm high
- Wafer Size
Up to 100mm
- Motor type
Servo motor
- XY Stage Travel
Up to 125mmx125mm
- XY Stage Resolution, Repeatability
Motorized, 0.1μm resolution, +/-0.5μm repeatability
- XY Speed/ acceleration (max)
Up to 1000mm/s, up to 35mm/s2
- Z Speed
20mm/s
- Platen Travel
12.7mm or 25mm
- Platen Adjustment
Dual coarse and fine control with better than 2.5µm repeatability
- Platen Planarity
<12.7μm across 150mm
- Platen Rigidity
<50μm for 4.5kg
- Vacuum Chuck
Multi-zone vacuum
- Chuck Flatness
+/-13μm
- Chuck Breakdown Voltage
At least 500V
- Chuck Isolation
At least 1GΩ
- Chuck Adjustment
360° coarse, +/-6° fine
- Microscope
High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X
- Feedthrough Terminals
BNC, Triax or Banana plug
- System Dimensions
78cm wide x80cm deep x 58cm high