Magnetic Probe Station

The MPS-C-300 and MPS-C-350 magnetic probe systems are the world’s first probe stations capable of providing three-dimensional magnetic field control around a device under test.

MicroXact’s truly unique patent-pending design enables wafer-level testing of spintronic devices, nanoscale electronics and many other materials and devices where magnetic fields are required for accurate test and measurement. Spin-current and spin torque oscillator testing, magnetic simulation and identification of anisotropy of complex multilayer structures are just few examples applications of our MPS systems.

Additional Information

Features

  • MPS series magnetic probe stations are the only probe stations on the market that offer arbitrary two- or three-dimensional orientation of applied magnetic field, making these probe stations an ultimate solution for spintronic device characterization and spintronic research.
  • MPS series magnetic probe stations are the only probe stations on the market that offer wafer-scale Vector magnetic field probing, making these systems ideally suited for testing of spintronic and magneto-electronic devices in production environments.
  • Fully customizable, open-source LabView-based control software that easily integrates with the most common test and measurement devices.
  • Available high-resolution micropositioners with 40, 80, 100 and 200TPI screws for down to micron-level positioning of probes.
  • Data collected and/or analyzed with a wide range of output formats and options available.
  • Systems are supplied with a three-dimensional Hall probe to provide unmatched stability and accuracy of the applied magnetic field via closed-loop control.

Options

  • Upgrade for 150mm or 200mm wafers.
  • Extended magnetic field uniformity.
  • Extended magnetic field stability.
  • Extended magnetic field range (from below 100μT to 0.3T for MPS-C-300 and to 0.6T for MPS-C-350).
  • High-resolution microscopes.
  • Polarizing microscopes for domain imaging during probing.
  • Upgrade for RF probing.
  • Extended temperature range probing.
  • Wide selection of cameras.
  • Wide selection of wafer chucks.
  • Wide selection of micropositioners, probe arms and probe tips.
  • Ultra quite vacuum pump.
  • Controlled environment measurements.

Magnetic Probe Station Specifications
  • MPS-C-350
  • MPS-C-300

  • MPS –C-350 is the most powerful MicroXact’s probe station for testing devices in 3D magnetic field.

  • It is available with and without feedback control loop.

  • The system uses three water-cooled C-magnets and requires either tap water or external chiller.

  • Various accessories (microscopes, micropositioners, DC or RF probes, light tight enclosure, thermal chucks) are available.

  • Wafer Size

    100mm, 150mm or 200mm

  • Magnetic field orientation

    Arbitrary 3D

  • Maximum magnetic field

    6kOe (0.6T)

  • Magnetic field orientation accuracy

    +/- 0.1°

  • Magnetic field uniformity across 10mm diameter area

    +/- 2%

  • Magnetic field stability

    Better than 0.1%

  • Wafer XY positioning resolution

    Better than 3μm (better than 2μm are available as option

  • Platen Z travel

    12.5mm

  • Microscope

    Several options available

  • MPS-C-300 is the less powerful but also more affordable version of MicroXact’s 3D magnetic field probe stations.

  • It is available with and without feedback control loop.

  • The system is upgradable to 150mm or 200mm wafers chucks.

  • Various accessories (microscopes, micropositioners, DC or RF probes, light tight enclosure, thermal chucks) are available.

  • Wafer Size

    100mm, 150mm or 200mm

  • Magnetic field orientation

    Arbitrary 3D

  • Maximum magnetic field

    3kOe (0.3T)

  • Magnetic field orientation accuracy

    +/- 0.1°

  • Magnetic field uniformity across 10mm diameter area

    +/- 2%

  • Magnetic field stability

    Better than 0.1%

  • Wafer XY positioning resolution

    Better than 3μm (better than 2μm are available as option

  • Platen Z travel

    12.5mm

  • Microscope

    Several options available